Optimizing processes with wafer/FOUP traceability
Tracking FOUPs in semiconductor manufacturing is important for contamination control, process optimization, yield improvement, quality control and compliance. It ensures the protection of wafers, optimizes workflow, enhances yield and maintains quality.
Challenge
Keeping up with traceability requirements
Efficiently tracking FOUPs in semiconductor manufacturing can be challenging due to the complexity of managing numerous FOUPs, handling large amounts of data, integrating with existing systems, ensuring automation accuracy, dealing with environmental factors, and complying with industry standards. Overcoming these challenges requires advanced tracking technologies, streamlined data management processes, seamless system integration, reliable automation solutions, environmental control measures, regular maintenance, and calibration procedures.
- Managing the complexity of numerous FOUPs types
- Integrating with existing systems
- Complying with industry standards
Solution
Meeting industry standards
Omron's RFID technology offers specialized features for semiconductor applications, including chemical resistance, compatibility with standardized glass transponders from Texas Instruments (reading and writing), and support for SECS I/II protocol. In addition to supporting SECS/GEM, it also supports five different SEMI standards. This technology tailored for SEMI will help fabs create consistency in the way FOUPs and pods are handled.
- Compatibility with TI transponders
- Support for SECS/GEM protocols
- Resistance to chemicals
Enabling Technologies
RFID Solutions
V640 RFID Reader/Writer/AntennaRFID system for use in various semiconductor applications (FOUPs and pods).
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