For vacuum applications in clean, hot environments the vaccuum resistant fibers and connecting flanges provide a long operational lifetime and vaccuum integrity.

  • Leakage rate of 1x10-10 Pa*m3/s max
  • Heat resistance up to 200°C
  • Detergent resistant fluororesin or stainless steel fiber sheath

For the detection of wafers in non-vacuum environments, see E32 Special application.

Vacuum resistance

The vacuum resistant fiber heads and flanges are sealed to prevent gas leakage into vacuum areas.